Applications of Granite/Marble in Semiconductor and Optoelectronic Manufacturing Equipment

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    In semiconductor and optoelectronic manufacturing equipment, Granite/Marble is primarily used in key components such as precision motion platforms, guideway bases, vibration-isolation support structures, and mounting bases for optical components. These components have extremely high requirements for precision, stability, and environmental resistance. The properties of Granite/Marble can accurately meet the stringent demands of the semiconductor and optoelectronic industries. The following is an analysis of specific application scenarios and advantages:

I. Main Application Components

Precision motion platforms (e.g., wafer platforms in lithography machines and bonding machines)

They are used to carry precision components such as wafers and optical lenses, enabling nanoscale translational and rotational movements.

Typical equipment: Worktables of lithography machines, positioning platforms of measuring equipment.

Guideway bases and frame structures

As the installation foundation for linear guideways and air-floating guideways, they support the core motion mechanisms of the equipment.

Typical equipment: Mechanical frames of semiconductor packaging equipment and optical inspection instruments.

Vibration isolation supports and stabilizing structures

They are used to isolate external vibrations (such as those from factory floors or during equipment operation) to ensure the stable operation of optical systems or precision machinery.

Typical scenarios: Base supports for optical microscopes and laser interferometers.

Mounting substrates for optical components

They fix optical devices such as mirrors, prisms, and lasers to ensure long-term stability of the alignment accuracy of optical path systems.

Typical equipment: Optoelectronic packaging equipment, fiber coupling systems.